Review and Acceptance Meeting for Standard for Specialty Gas and Chemicals Delivery Facility Held in GenTech
On November 19th, the review and acceptance meeting for "General Standard for Specialty Gas and Chemicals Delivery Facilities for Electronics Factory" (" Standard") was held at Shanghai GenTech Co., Ltd. ("GenTech"). Personnel from over 10 related drafting organizations and 30 reviewing experts attended this meeting.During the meeting, they reviewed the standards draft, research work reports as well as reports for exclusive themes..
This standard is jointly researched and compiled by the Electronic Engineering Standard Quota Station from China Academy of Electronic Technology Standardization, the Technology Engineering Co., Ltd. of 11th Electronics Design and Research Institute of Information Industry and other related companies. The currently completed standards mainly involved in the design for specialty gas and chemical delivery facility, supporting facility design, construction and acceptance, operation and maintenance, as well as abandonment and demolition. As one of the main participating companies,GenTech has mainly completed the drafting for specialty gas equipment and transportation systems chapter. And this work has been highly recognized by the Electronic Engineering Standard Quota Station from China Academy of Electronic Technology Standardization. Upon releasing and publishing, it will become a comprehensive guidance document for gas and chemical delivery systems in the pan-semiconductor industry.
Specialized in process critical systems and solutions in IC, flat panel display, solar PV, LED, fiber optics and bio-pharmaceutical industries for nearly for nearly two decades,GenTech has been committed to promoting the formulation of industry-related specifications and standards. For instance,GenTech participated in the drafting and formulation of national standards including “Technical Standards GB50781 for Chemical System in Electronic Engineering ”, " Technical Standards GB50646 for Specialty Gas System Engineering ", " Technical Standards GB50724 for Bulk Gas Purification and Transportation System Engineering " and " Technical Standards GB50945 for Optical Fiber Engineering ",filling the blank in this field and providing guidance and reference standard for the safe use of gas and chemical in the pan-semiconductor industry.
GenTech incorporates years of process application database and project experience into the standard writing, such as high-purity process system micro-contamination control technology. This technology is based on material science and surface treatment process principles. In detail, the system design, material selection, equipment manufacturing, on-site clean environment, construction methods, quality inspection, equipment testing and debugging as well as other critical links are under control to avoid second contamination from delivery system to process media, ensuring the purity of high-purity gases and chemicals during the distribution process. At present,GenTech's high-purity distribution system can guarantee the delivery of gas and chemicals with a purity of 99.9999999% (9N).
In addition, most of the specialty gas and chemicals are featured as flammable, explosive, highly toxic and corrosive, which contributing to the complicated process and is likely to threaten the life of the system, even the lives of workers. In the chapter about specialty gas equipment and delivery system,GenTech has especially emphasized the importance of hardware intrinsic safety, process design safety, system linkage safety control, process monitoring and comprehensive safety management to achieve safety and security.GenTech adopts sophisticated gas detection technology to detect emission points and environmental points, which can ensure that emissions and working environment gas indicators meet safety requirements. When an accidental leakage occurs in the system, the monitoring system can alarm in time, automatically cut off the gas supply and initiate an emergency response to ensure the safety of personnel, equipment and environment.
After the review and acceptance, the " General Standard for Specialty Gas and Chemicals Delivery Facilities for Electronics Factory " will be submitted to the Standards and Quota Department of the Housing and Urban-Rural Development Ministry and the Planning Department of the Industry and Information Technology Ministry for approval. Upon approval, the compilation of the standard will be organized.
